シリコン歪ゲージを用いた力計測用マイクロセンサ : 力センサの構造設計, 試作, 評価実験 Functional Micro Sensor for Force Measurement with Silicon Strain Gauge : Structural Design, Development and Evaluation Experiment of Force Sensor

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In this paper, we propose the design guideline of the micro force sensor that becomes important as a force measurement method with a semiconductor strain gauge. The range of the force can be measured is from μN to N, and we controlled the stress applied to the sensor by devising the sensor structure. We developed three types of force sensor to cover such a wide range. The force sensor to measure μN level of force has the cantilever structure, which can transmit the minute force effectively. The force sensor for mN range force is pressure sensor type, and the force can be measured as pressure through the transmission medium to avoid breakage. The force sensor for N range force adopted a new method that the force is directly applied to the diaphragm. We designed each type of sensor based on simulation, and enabled the output voltage range to mV/V regardless of the type. Then we made the prototypes (Maicrogrippar, Catheter Touch Sensor, and Belt Tension Sensor) that applied each sensor. As a result, we verifie the effectiveness of our design guideline for micro sensors to measure several ranges of force.

収録刊行物

  • 日本ロボット学会誌 = Journal of Robotics Society of Japan  

    日本ロボット学会誌 = Journal of Robotics Society of Japan 24(6), 754-765, 2006-09-15 

    The Robotics Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018207623
  • NII書誌ID(NCID)
    AN00141189
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    02891824
  • NDL 記事登録ID
    8067876
  • NDL 雑誌分類
    ZN11(科学技術--機械工学・工業)
  • NDL 請求記号
    Z16-1325
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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