Metal gate technology for nanoscale transistors-material selection and process integration issues

• YEO Yee-Chia

Journal

• Thin Solid Films

  Thin Solid Films 462 (462), 34-41, 2004

Details

• CRID: 1573105975216047232
• NII Article ID: 10018216400
• Data Source:
  • CiNii Articles