Thin Films formed by Radiofrequency Sputtering of .BETA.-tricalcium phosphate

• Kimoto Katsuhiko

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

• Watazu Akira

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College National Institute of Advanced Industrial Science and Technology (AIST)

• Tanaka Kinya

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

• Sonoda Tsutomu

  National Institute of Advanced Industrial Science and Technology (AIST)

• Kushida Sachio

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

• Hoshi Noriyuki

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

• Sawada Tomoji

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

• Toyoda Minoru

  Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

抄録

Purpose: The purpose of this study was to evaluate the feasibility of formation of thin film coatings of bioactive ceramics, such as β-tricalcium phosphate (β-TCP), by radio frequency (RF) sputtering. In this paper, we report the results of our preliminary attempts, as a trial of this concept, to use radio frequency sputtering for obtaining thin film coatings of a ceramic substance on a quartz glass substrate.<BR>Methods: We attempted to obtain a thin film coating of β-TCP on a quartz glass surface using an RF sputtering deposition system (L-332S-5FHS, ANELVA, Japan). We examined the thickness of the films deposited on the quartz glass substrate with a confocal laser scanning microscope and characterized the films by electron probe microanalysis (EPMA), scanning electron microscopy (SEM), X ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD) analysis.<BR>Results: The films were found to be about 0.51 μm in thickness. Although our attempt was directed at obtaining a β-TCP coating on the quartz glass surface, the resultant film consisted of Ca and P in the ratio of 3:1, and was almost amorphous. However, the Ca and P were uniformly distributed on the surface of the films, confirming the feasibility of using an RF sputtering system to obtain a homogeneous film coating.<BR>Conclusion: Our results suggest that RF sputtering may be a feasible technique for the preparation of ceramic coatings.

収録刊行物

• Prosthodontic Research & Practice

  Prosthodontic Research & Practice 5 (3), 137-142, 2006

  公益社団法人 日本補綴歯科学会

キーワード

• Radiofrequency (RF) sputtering system
• β-tricalcium phosphate (β-TCP)
• Ca-P film
• XRD
• XPS

詳細情報

• CRID: 1390282680171700480
• NII論文ID: 10018226030
• NII書誌ID: AA11728086
• DOI: 10.2186/prp.5.137
• ISSN: 13477021
• Web Site: http://www.jstage.jst.go.jp/article/prp/5/3/5_3_137/_pdf
• Web Site: https://search.jamas.or.jp/link/ui/2007174248
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可