Thin Films formed by Radiofrequency Sputtering of β-tricalcium phosphate

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著者

    • KIMOTO Katsuhiko
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College
    • WATAZU Akira
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College
    • TANAKA Kinya
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College
    • SONODA Tsutomu
    • National Institute of Advanced Industrial Science and Technology (AIST)
    • KUSHIDA Sachio
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College
    • HOSHI Noriyuki
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College
    • SAWADA Tomoji
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College
    • TOYODA Minoru
    • Department of Oral & Maxillofacial Rehabilitation, Kanagawa Dental College

抄録

<B>Purpose:</B> The purpose of this study was to evaluate the feasibility of formation of thin film coatings of bioactive ceramics, such as β-tricalcium phosphate (β-TCP), by radio frequency (RF) sputtering. In this paper, we report the results of our preliminary attempts, as a trial of this concept, to use radio frequency sputtering for obtaining thin film coatings of a ceramic substance on a quartz glass substrate.<BR><B>Methods:</B> We attempted to obtain a thin film coating of β-TCP on a quartz glass surface using an RF sputtering deposition system (L-332S-5FHS, ANELVA, Japan). We examined the thickness of the films deposited on the quartz glass substrate with a confocal laser scanning microscope and characterized the films by electron probe microanalysis (EPMA), scanning electron microscopy (SEM), X ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD) analysis.<BR><B>Results:</B> The films were found to be about 0.51 μm in thickness. Although our attempt was directed at obtaining a β-TCP coating on the quartz glass surface, the resultant film consisted of Ca and P in the ratio of 3:1, and was almost amorphous. However, the Ca and P were uniformly distributed on the surface of the films, confirming the feasibility of using an RF sputtering system to obtain a homogeneous film coating.<BR><B>Conclusion:</B> Our results suggest that RF sputtering may be a feasible technique for the preparation of ceramic coatings.

収録刊行物

  • Prosthodontic research & practice  

    Prosthodontic research & practice 5(3), 137-142, 2006-11-21 

    Japan Prosthodontic Society

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各種コード

  • NII論文ID(NAID)
    10018226030
  • NII書誌ID(NCID)
    AA11728086
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13477021
  • データ提供元
    CJP書誌  CJP引用  J-STAGE 
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