Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology

• Kei Kuwabara

• Masami Urano

• Junichi Kodate

Bibliographic Information

Other Title

• Novel Structure and Fabrication Process for Integrated RF Microelectromechanical System Technology

Abstract

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

Journal

• Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45 (9A), 6849-6853, 2006-09

  Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Keywords

• MEMS
• integration
• encapsulation
• switch

Details

• CRID: 1520853832844930048
• NII Article ID: 10018245372
• NII Book ID: AA10457675
• ISSN: 00214922
• ISSN: 13474065
• ISSN: http://id.crossref.org/issn/13474065
• DOI: 10.1143/jjap.45.6849
• NDL BIB ID: 8055346
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8055346
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.6849
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.6849/pdf
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles