Driving-Voltage Reduction of Electrostatically Tunable Infrared Filter

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Infrared Fabry–Perot filters were fabricated by stacking two silicon plates etched in KOH solution. When we applied a voltage between the plates, the spacing between them was decreased by an electrostatic force, which caused a shift in interference wavelength. The silicon plates were etched to 34 μm thickness to reduce the driving voltage. When the voltage was increased from 0 to 20 V, the wavelength of the interference peak shifted from 7.9 to 5.5 μm, corresponding to the decrease in the spacing from 7.9 to 5.5 μm. The peak transmittance increased to ${\sim}90$% by coating an antireflection film on the outer surface of the filter. This coating was effective in suppressing the interference inside the silicon plates, which created a complicated spectrum.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes  

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(9A), 6951-6954, 2006-09-15 

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

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各種コード

  • NII論文ID(NAID)
    10018245818
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    8055788
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  JSAP 
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