Development of High-Peak and High-Average-Power LD Pumped Solid-State Laser System for EUV Generation

• TSUBAKIMOTO Koji

  Institute of Laser Engineering, Osaka University

• YOSHIDA Hidetsugu

  Institute of Laser Engineering, Osaka University

• FUJITA Hisanori

  Institute of Laser Engineering, Osaka University

• NAKATSUKA Masahiro

  Institute of Laser Engineering, Osaka University

Bibliographic Information

Other Title

• 極端紫外光発生用高繰り返し固体レーザー装置の開発
• キョクタン シガイコウ ハッセイヨウ コウクリカエシ コタイ レーザー ソウチ ノ カイハツ

Abstract

We are developing a 5kW (5kHz, 1J, 1-10ns) solid state laser system for EUV lithography. The Laser system is constructed by the fiber oscillator, regenerative amplifier and three amplifier stages. The output power is achieved at 955W, 10kHz, 7ns. The main amplifier modules are pumped with high power density over 400 W/cm. The thermal lens effect is not sphere, and includes high order phase aberrations. The phase aberration disturbs the propagation of the laser light. In addition, the spectral shift of the fluorescence is caused by rising the temperature of the laser medium.

Journal

• The Review of Laser Engineering

  The Review of Laser Engineering 34 (9), 628-632, 2006

  The Laser Society of Japan

Keywords

• Solid state laser
• High average
• High peak
• EUV

Details

• CRID: 1390282679624193152
• NII Article ID: 10018250434
• NII Book ID: AN00255326
• DOI: 10.2184/lsj.34.628
• COI: 1:CAS:528:DC%2BD28XhtFSktrrF
• ISSN: 13496603
• ISSN: 03870200
• NDL BIB ID: 8514978
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8514978
• Web Site: https://www.jstage.jst.go.jp/article/lsj/34/9/34_628/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed