産業用途向け高出力・高繰り返し波長変換LD-YAGレーザー High-Power and High-Repetition Frequency Conversion LD-YAG Laser for Industrial Applications
We report on the recent developments of laser-diode pumped frequency conversion solid-state lasers in our section. A 150W TEM<SUB>00</SUB> mode, linearly polarized 1064nm beam was generated with a MOPA system. The system was applied for high-power frequency conversion. 30W 355nm and 5.6W 213nm output power was generated at a repetition rate of more than 10kHz. Frequency-tripling-efficiency of CBO (CsB<SUB>3</SUB>O<SUB>5</SUB>) crystal was compared with LBO (LiB<SUB>3</SUB>O<SUB>5</SUB>) crystal experimentally. We also introduce an industrial 200W 532nm laser, developed for TFT annealing process.
レーザー研究 34(9), 640-643, 2006-09-15
The Laser Society of Japan