Preparation of Calcium Phosphate Films by Radiofrequency Magnetron Sputtering

• Narushima Takayuki

  Tohoku University Biomedical Engineering Research Organization (TUBERO)

• Ueda Kyosuke

  Department of Materials Processing, Tohoku University

• Goto Takashi

  Institute for Materials Research, Tohoku University

• Masumoto Hiroshi

  Institute for Materials Research, Tohoku University

• Katsube Tomoyuki

  Tohoku University Biomedical Engineering Research Organization (TUBERO)

• Kawamura Hiroshi

  Graduate School of Dentistry, Tohoku University

• Ouchi Chiaki

  Department of Materials Processing, Tohoku University

• Iguchi Yasutaka

  Department of Materials Processing, Tohoku University

Abstract

Calcium phosphate films were prepared on titanium substrates by radiofrequency (RF) magnetron sputtering at RF powers from 75 to 150 W. Hot-pressed β-tricalcium phosphate (β-TCP) plates with a high density (>99.6%) were used as a sputtering target. The substrate was not intentionally heated. The films consisted of amorphous calcium phosphate and oxyapatite (Ca₁₀(PO₄)₆O) phases. The ratio of the oxyapatite phase depended on the sputtering conditions of RF power, oxygen gas concentration in the sputtering gas (C_O<SUB>2</SUB>) and total pressure in the chamber. The (002) preferred orientation of oxyapatite phase was observed. The deposition rate of films increased with increasing RF power and decreasing C_O<SUB>2</SUB>. The highest deposition rate was 0.143 nm·s⁻¹ (0.515 μm·h⁻¹).

Journal

• MATERIALS TRANSACTIONS

  MATERIALS TRANSACTIONS 46 (10), 2246-2252, 2005

  The Japan Institute of Metals and Materials

Keywords

• calcium phosphate
• oxyapatite
• sputtering
• biomaterials
• titanium

Details

• CRID: 1390282679227555968
• NII Article ID: 10018277765
• NII Article ID: 130004452619
• NII Book ID: AA1151294X
• DOI: 10.2320/matertrans.46.2246
• ISSN: 13475320
• ISSN: 13459678
• HANDLE: 10097/51987
• NDL BIB ID: 7487947
• Web Site: https://tohoku.repo.nii.ac.jp/records/26596
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7487947
• Web Site: https://www.jstage.jst.go.jp/article/matertrans/46/10/46_10_2246/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed