Surface Free Energy of Alloy Nitride Coatings Deposited Using Closed Field Unbalanced Magnetron Sputter Ion Plating

この論文にアクセスする

この論文をさがす

著者

抄録

The sticking of product material to injection molding tools is a serious problem, which reduces productivity and reliability. Depositing alloy nitride coatings (TiN, ZrN, CrN, and TiAlCrN) using closed field unbalanced magnetron sputter ion plating and electrodeposition of chromium, and characterizing their surface free energies in the temperature range 20–120°C have led to the development of a non-sticking (with a low surface free energy) coating system for semiconductor IC packaging molding dies. The contact angles of water, diiodomethane and ethylene glycol on the coated surfaces were measured at temperatures in the range 20–120°C using a Dataphysics OCA-20 contact angle analyzer. The surface free energy of the coatings and their components (dispersion and polar) were calculated using the Owens-Wendt geometric mean approach. The surface roughness of these coatings were investigated by atomic force microscopy (AFM). The adhesion force of these coatings were measured using direct tensile pull-off test apparatus. The experimental results revealed that TiAlCrN, CrN and ZrN coatings outperformed Hard-Cr and TiN coatings in terms of anti-adhesion, and thus have the potential as working layers for injection molding industrial equipment, especially in semiconductor IC packaging molding applications.

収録刊行物

  • Materials transactions  

    Materials transactions 47(10), 2533-2539, 2006-10-20 

    The Japan Institute of Metals and Materials

参考文献:  22件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

被引用文献:  1件

被引用文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10018310330
  • NII書誌ID(NCID)
    AA1151294X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13459678
  • NDL 記事登録ID
    8092115
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z53-J286
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
ページトップへ