Preparation of Pyrochlore Ca_2Ti_2O_6 by Metal-Organic Chemical Vapor Deposition

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Ca-Ti-O films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)<SUB>2</SUB> and Ti(O-i-Pr)<SUB>2</SUB>(dpm)<SUB>2</SUB> precursors, and the effects of substrate temperature (<I>T</I><SUB>sub</SUB>) and <I>Ca/Ti</I> ratio (<I>R</I><SUB>Ca/Ti</SUB>) on the crystal structure and morphology were studied. Ca-Ti-O films consisting of pyrochlore Ca<SUB>2</SUB>Ti<SUB>2</SUB>O<SUB>6</SUB> and perovskite CaTiO<SUB>3</SUB> phase were obtained at <I>T</I><SUB>sub</SUB>=1073 K and 0.35<<I>R</I><SUB>Ca/Ti</SUB><1. The content of pyrochlore Ca<SUB>2</SUB>Ti<SUB>2</SUB>O<SUB>6</SUB> increased with decreasing <I>R</I><SUB>Ca/Ti</SUB>. Pyrochlore Ca<SUB>2</SUB>Ti<SUB>2</SUB>O<SUB>6</SUB> almost in a single phase was obtained at <I>R</I><SUB>Ca/Ti</SUB>=0.46. The morphology of pyrochlore Ca<SUB>2</SUB>Ti<SUB>2</SUB>O<SUB>6</SUB> was agglomerated fine grains about 50 nm in diameter having a columnar texture.

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  • Materials transactions  

    Materials transactions 47(10), 2603-2605, 2006-10-20 

    日本金属学会

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各種コード

  • NII論文ID(NAID)
    10018310583
  • NII書誌ID(NCID)
    AA1151294X
  • 本文言語コード
    ENG
  • 資料種別
    SHO
  • ISSN
    13459678
  • NDL 記事登録ID
    8092455
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z53-J286
  • データ提供元
    CJP書誌  NDL  IR  J-STAGE 
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