Preparation of Pyrochlore Ca<SUB>2</SUB>Ti<SUB>2</SUB>O<SUB>6</SUB> by Metal-Organic Chemical Vapor Deposition

• Sato Mitsutaka

  Department of Materials Science, Graduate School of Engineering, Tohoku University

• Tu Rong

  Institute for Materials Research, Tohoku University

• Goto Takashi

  Institute for Materials Research, Tohoku University

Bibliographic Information

Other Title

• Preparation of Pyrochlore Ca2Ti2O6 by Metal-Organic Chemical Vapor Deposition

Abstract

Ca-Ti-O films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)₂ and Ti(O-i-Pr)₂(dpm)₂ precursors, and the effects of substrate temperature (T_sub) and Ca/Ti ratio (R_Ca/Ti) on the crystal structure and morphology were studied. Ca-Ti-O films consisting of pyrochlore Ca₂Ti₂O₆ and perovskite CaTiO₃ phase were obtained at T_sub=1073 K and 0.35<R_Ca/Ti<1. The content of pyrochlore Ca₂Ti₂O₆ increased with decreasing R_Ca/Ti. Pyrochlore Ca₂Ti₂O₆ almost in a single phase was obtained at R_Ca/Ti=0.46. The morphology of pyrochlore Ca₂Ti₂O₆ was agglomerated fine grains about 50 nm in diameter having a columnar texture.

Journal

• MATERIALS TRANSACTIONS

  MATERIALS TRANSACTIONS 47 (10), 2603-2605, 2006

  The Japan Institute of Metals and Materials

Keywords

• metal-organic chemical vapor deposition
• calcium titanate
• pyrochlore
• microstructure

Details

• CRID: 1390001204250688512
• NII Article ID: 10018310583
• NII Book ID: AA1151294X
• DOI: 10.2320/matertrans.47.2603
• ISSN: 13475320
• ISSN: 13459678
• HANDLE: 10097/52363
• NDL BIB ID: 8092455
• Web Site: https://tohoku.repo.nii.ac.jp/records/44291
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8092455
• Web Site: https://www.jstage.jst.go.jp/article/matertrans/47/10/47_10_2603/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed