Low-Temperature Solid-Phase Crystallization of Amorphous SiGe Films on Glass Substrates

• Miyao Masanobu

  Department of Electronics, Kyushu University

• Kanno Hiroshi

  Department of Electronics, Kyushu University

• Sadoh Taizoh

  Department of Electronics, Kyushu University

Bibliographic Information

Other Title

• 多結晶シリコン太陽電池の高効率化にむけた材料科学的アプローチ　　ガラス上に於ける多結晶ＳｉＧｅの低温固相成長
• ガラス ジョウ ニ オケル タケッショウ SiGe ノ テイオンコソウ セイチョウ

Journal

• Materia Japan

  Materia Japan 45 (10), 725-728, 2006

  The Japan Institute of Metals and Materials

Keywords

• large scale integration
• display
• solar cell
• silicon germanium
• metal-induced lateral crystallization
• nickel
• szlicide

Details

• CRID: 1390001204055277824
• NII Article ID: 10018310888
• NII Book ID: AN10433227
• DOI: 10.2320/materia.45.725
• ISSN: 18845843
• ISSN: 13402625
• NDL BIB ID: 8550918
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8550918
• Web Site: https://www.jstage.jst.go.jp/article/materia1994/45/10/45_10_725/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles