Numerical Analysis of MEMS Structures with Transient Effect in Three Dimension

• IWAMATSU Hiroshi

  Tokyo University of Technology

• KURODA Michiko

  Tokyo University of Technology

Bibliographic Information

Other Title

• MEMS構造体の過渡的現象を含む3次元数値解析

Journal

• 電気学会研究会資料. : The Papers of Technical Meeting on Electromagnetic Theory, IEE Japan. EMT, 電磁界理論研究会

  電気学会研究会資料. : The Papers of Technical Meeting on Electromagnetic Theory, IEE Japan. EMT, 電磁界理論研究会 2006 (116), 11-14, 2006-10-27

Keywords

• RF MEMES
• Body Fitted Grid Generation Method with Moving Boundaries

Details

• CRID: 1570572700402862848
• NII Article ID: 10018313289
• NII Book ID: AN00346578
• Text Lang: ja
• Data Source:
  • CiNii Articles
  • KAKEN