A Novel Method of Synthesizing Spherical Nano-structured Composite Particles of Aluminum Nitride using Transferred Type DC Arc Plasma
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Aluminum nitride (AlN) composite particles consisting of nano-particles dispersed on the surface of spherical micro-particles are one of the materials necessary for developing solid insulating materials with high thermal conductivity. This paper describes a novel method of synthesizing AlN composite particles using transferred type DC nitrogen arc plasma. The shape of the synthesized particles, the diameter of micro-particles and the volume fraction of micro-particles in the synthesized composite particles were controlled simply by varying the travelling time of the raw AlN angular particles in the arc plasma. The travelling time was controlled by varying the plasma length and the plasma gas flow rate. The diameter of the nano-particles in the synthesized composite particles was controlled simply by varying the travelling time of the raw AlN particles in the arc plasma, and varying the temperature and the vapor density in the nano-particle synthesis space. The temperature and the vapor density were controlled by varying the flow rate of reacting/quenching ammonia gas. The AlN content in the synthesized composite particles was higher than 99%.
- IEEJ Transactions on Fundamentals and Materials
IEEJ Transactions on Fundamentals and Materials 126(11), 1050-1056, 2006-11-01
The Institute of Electrical Engineers of Japan