高移動度チャネルを有するひずみ Si-on-insulator/ ひずみ SiGe-on-insulator デュアルチャネルCMOSの作製と電気特性 Fabrication and Electrical Characterization of Strained Si-on-insulator/Strained SiGe-on-insulator Dual Channel CMOS structures with High-Mobility Channels

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Mobility enhancement technologies by incorporating strain in MOSFETs have been recognized as key technologies for scaled CMOS devices. The most promising channel materials for n- and p-channel MOSFETs are tensily-strained Si and compressively-strained Ge (SiGe), respectively, from the viewpoint of their high mobility values. In this paper, dual channel CMOS structures with strained Si-on-insulator (strained-SOI)-nMOSFETs and strained SiGe-on-insulator (strained-SGOI)-pMOSFETs are demonstrated as well as their high channel mobility and current drive enhancements. Strained Si channels on a relaxed SGOI substrate and Ge-rich strained SGOI channels are located on the nMOS and pMOS regions of the same wafer, respectively. The dual channel structure was fabricated by a CMOS process combined with the Ge condensation process, in which the epitaxially grown SiGe layer on the SOI substrate was locally oxidized at high temperatures. As a result, significant electron- and hole-mobility enhancements for the strained SOI and SGOI channels were observed as well as the drain current enhancements. Based on the measured mobility for the nMOS and pMOS channels in the CMOS devices, CMOS performance enhancement of 30% was estimated.

収録刊行物

  • 電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society  

    電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 126(11), 1332-1339, 2006-11-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018318318
  • NII書誌ID(NCID)
    AN10065950
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    03854221
  • NDL 記事登録ID
    8560320
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-795
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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