A Micromachined Thermal Flow Sensor Applied to A PC Mouse Device

• Sasaki Sho

  Omron Corporation Ritsumeikan University

• Fujiwara Takeshi

  Omron Corporation

• Nozoe Satoshi

  Omron Corporation

• Sato Fumihiko

  Omron Corporation

• Imanaka Koichi

  Omron Corporation Ritsumeikan University

• Sugiyama Susumu

  Ritsumeikan University

書誌事項

タイトル別名

• Micromachined Thermal Flow Sensor Applied to A PC Mouse Device

抄録

This paper reports on a new PC mouse device by the use of the micromachined thermal flow sensors. The proposed mouse contains two small flow sensors mounted in two 10-mm-diameter and 3-mm-depth spaces in order to measure its velocity and direction. When the mouse is moved to a direction, air flow is generated because the air tends to stay where it is. Our sensors can detect the wide range flow speed which enables the mouse speed ranging from hundreds to one mm/s. The present flow mouse is as small as an optical one and it can work even on a smooth transparent glass. The results indicate that displacement can be measured with in an error ratio ±2% at 10, 50, 100 and 150 mm/s. This error ratio is good enough for this application.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 126 (11), 607-611, 2006

  一般社団法人 電気学会

キーワード

• MEMS
• flow sensor
• mouse
• anemometer

詳細情報

• CRID: 1390001204461300224
• NII論文ID: 10018318834
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.126.607
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 8560091
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8560091
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/126/11/126_11_607/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可