多重光路型レーザ干渉計による高周波数用振動加速度校正装置の開発 Development of Primary Calibration System for Vibration and Acceleration Standard in High Frequency Range with Laser Interferometer with Multifold Optical Path

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This paper outlines the development of a new primary calibration system for vibration and acceleration standard extending to the frequency range up to 10 kHz at the National Metrology Institute of Japan (NMIJ). In order to achieve this purpose, two types of laser interferometer with multifold optical path (twofold and fourfold optical paths) are discussed as measurement technique for quite small dynamic displacement down to 25 nm. These laser interferometers are successfully installed into the primary calibration system for the sine-approximation method in compliance with ISO-16063-11. The primary calibration system with the laser interferometer with multifold optical path are capable of performing practical calibration within maximum expanded uncertainty of 3.5 % in a higher frequency range up to 10 kHz.

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  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 126(11), 612-620, 2006-11-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018318845
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8560127
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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