Micropatterning of Organic-Inorganic Hybrid Film Using Photosensitive Sol-Gel System Consisting of Double-decker-shaped Multifunctional Silsesquioxane
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The micropatterning of an organic–inorganic hybrid film consisting of a double-decker-shaped multifunctional silsesquioxane was achieved using a photosensitive sol–gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.
- Chemistry Letters
Chemistry Letters 35(10), 1130-1131, 2006-10-05
The Chemical Society of Japan