Micropatterning of Organic-Inorganic Hybrid Film Using Photosensitive Sol-Gel System Consisting of Double-decker-shaped Multifunctional Silsesquioxane

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著者

    • WATANABE Akira
    • Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
    • MIYASHITA Tokuji
    • Institute of Multidisciplinary Research for Advanced Materials, Tohoku University

抄録

The micropatterning of an organic–inorganic hybrid film consisting of a double-decker-shaped multifunctional silsesquioxane was achieved using a photosensitive sol–gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.

収録刊行物

  • Chemistry letters

    Chemistry letters 35(10), 1130-1131, 2006-10-05

    The Chemical Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018323051
  • NII書誌ID(NCID)
    AA00603318
  • 本文言語コード
    ENG
  • 資料種別
    SHO
  • ISSN
    03667022
  • データ提供元
    CJP書誌  J-STAGE 
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