Formation of Nanoparticles by Control of Electron Temperature in Hollow-Typed Magnetron Radio Frequency CH4/H2 Plasma

• Junichi Emi

• Kohgi Kato

• Toshimi Abe

書誌事項

タイトル別名

• Formation of Nanoparticles by Control of Electron Temperature in Hollow Typed Magnetron Radio Frequency CH4 H2 Plasma
• Special Issue: Plasma Processing
• Special Issue Plasma Processing

抄録

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌

収録刊行物

• Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP

  Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 45 (10B), 8071-8074, 2006-10

  Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

キーワード

• nanoparticle
• low-electron-temperature plasma
• diamond
• graphite

詳細情報

• CRID: 1520009407174126336
• NII論文ID: 10018338858
• NII書誌ID: AA10457675
• ISSN: 00214922
• ISSN: 13474065
• DOI: 10.1143/jjap.45.8071
• NDL書誌ID: 8519939
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8519939
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.8071
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.45.8071/pdf
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • Crossref
  • CiNii Articles