# Flexible Arrays of Ni/Polyimide/Cu Microplasma Devices with a Dielectric Barrier and Excimer Laser Ablated Microcavities

## 抄録

Microcavity plasma devices with circular, crescent or, for example, trapezoidal cross-section microcavities (characteristic dimension $d=30--100$ μm), produced by excimer laser ablation and overcoated with a silicon nitride barrier film, have been fabricated in Ni/30 μm polyimide/3 μm Cu layered substrates. $12\times 12$ arrays of devices with cylindrical microcavities 100 μm in diameter exhibit turn-on voltages of 255–270 Vrms for a Ne pressure of 700 Torr and a sinusoidal excitation voltage having a frequency of 5–20 kHz. All of the device designs explored to date operate in the abnormal glow region, and an increase of 15–20% in the ignition voltage for these arrays is observed when $pd$ is raised from 4 to 5 Torr cm. Tests in which the arrays were intentionally damaged or photoablation parameters were altered from the optimal values show the microplasma devices to be extraordinarily robust and insensitive to the cross-sectional shape of the microcavity.

## 収録刊行物

• Japanese journal of applied physics. Pt. 1, Regular papers & short notes

Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(10B), 8221-8224, 2006-10-30

Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

## 各種コード

• NII論文ID(NAID)
10018339386
• NII書誌ID(NCID)
AA10457675
• 本文言語コード
EN
• 資料種別
ART
• 雑誌種別
大学紀要
• ISSN
0021-4922
• NDL 記事登録ID
8520613
• NDL 雑誌分類
ZM35(科学技術--物理学)
• NDL 請求記号
Z53-A375
• データ提供元
CJP書誌  NDL  JSAP

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