Highly Aligned Growth of Carbon Nanotubes by RF-Plasma-Assisted DC Plasma Chemical Vapor Deposition at High Pressure
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Very highly aligned carbon nanotubes (CNTs) were synthesized by radio-frequency-plasma-assisted direct current (DC) plasma chemical vapor deposition, which was developed for the large-area growth of highly aligned CNTs under a stable condition in a DC plasma. Three parallel electrodes, namely, an RF electrode, a grounded electrode, and a DC cathode, were arranged in a vacuum chamber. It was found that the application of a high DC voltage at a high pressure forms a high sheath electric field, resulting in the highly aligned growth of CNTs without severe damage.
- Jpn J Appl Phys
Jpn J Appl Phys 45(10B), 8308-8310, 2006-10-30
INSTITUTE OF PURE AND APPLIED PHYSICS