Comparison of Properties of Diamond Nanowhiskers Obtained by Etching Diamond Films with Different Metal Coatings in Radio Frequency Plasma

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著者

    • Li Chaoyang Li Chaoyang
    • Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami city, Kochi 782-8502, Japan
    • Hatta Akimitsu Hatta Akimitsu
    • Department of Electronic and Photonic Systems Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami city, Kochi 782-8502, Japan

抄録

The properties of diamond nanowhiskers fabricated from uncoated and oxidizable metals coated diamond film surfaces were compared. Whiskers with average diameter of 50 nm were obtained from all of samples. Iron was found to be the easiest etching metal among the metals used. Metal coatings reduce the number density of whiskers and inhibit etching rate as masks. The lowest density (about 20 μm-2) is obtained by the whiskers fabricated on Mo-coated diamond films. Raman spectroscopy measurement illustrates that a diamond bonding sp3 structure is uninfluenced by the etching process. It is also confirmed that the obtained whiskers show a good field emission behavior. The highest emission current density ($10^{-5}$ A/μm2) was obtained on the sample with the lowest number density.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes  

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(10B), 8378-8380, 2006-10-30 

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

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各種コード

  • NII論文ID(NAID)
    10018339886
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    8521143
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  JSAP 
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