Development of Micro Capacitive Inclination Sensor
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A micro capacitive inclination sensor was developed by using micro machining techniques. Electrodes of the sensor are 40 μm in a gap and 12 mm<sup>2</sup> in area. The sensor detects difference of capacitance, which varies with movement of silicone oil accompanying with inclination of the sensor, but there is a problem of surface tension caused by the narrow gap of the electrodes. In order to solve the problem, novel structures of the sensor for injection of the oil into micro channels and retaining a horizontal plane of the oil were devised. As a result, downsizing of the sensor was realized.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 126(12), 637-642, 2006-12-01
The Institute of Electrical Engineers of Japan