高精度角度センサと角度計測技術の研究 Study on High-Precision Angle Sensor and Angle measurement Technology

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In recent years, high-precision and high-resolution encoders are expected for a nanotechnology control system. High-precision angle calibration apparatuses are required and hence, they have been developed according to industry expectations. The accuracy of the disk and angle sensor were calibrated with high precision using the same accuracy measurement system, and a high-precision angle sensor was achieved. Using the high-precision angle calibration system, the encoder was realized with a high level of wide accuracy of 0.2 seconds. In addition, a high-resolution angle sensor with 30-bit could be achieved, and the multi-functional angle sensor which have acceleration data and bus-communications for servo system was developed. The principle by which the angle sensor calibrates the accuracy by it-self has been developed. The base technology of applying an angle sensor to a nanotechnology system was established.

収録刊行物

  • 電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society  

    電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society 126(12), 1629-1636, 2006-12-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018402684
  • NII書誌ID(NCID)
    AN10012320
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09136339
  • NDL 記事登録ID
    8593135
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-1608
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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