Magnetic Levitated 2D Fast Drive
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This paper presents the design and implementation of a two dimensional drive. The moving part of the system is free of any contact and wires. The lightness of the moving part along with the big forces the 2D drive is capable to provide, makes feasible to obtain great accelerations. It has a compact sensoring system, and protected in a way that any colisions will not damage its important parts. The table has a traverse of 160mm in an axe and 125mm in the other one. A resolution of 0.02<i>μ</i>m is obtained in each of the moving axes.
- IEEJ Transactions on Sensors and Micromachines
IEEJ Transactions on Sensors and Micromachines 126(12), 1678-1681, 2006-12-01
The Institute of Electrical Engineers of Japan