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This paper presents the design and implementation of a two dimensional drive. The moving part of the system is free of any contact and wires. The lightness of the moving part along with the big forces the 2D drive is capable to provide, makes feasible to obtain great accelerations. It has a compact sensoring system, and protected in a way that any colisions will not damage its important parts. The table has a traverse of 160mm in an axe and 125mm in the other one. A resolution of 0.02<i>μ</i>m is obtained in each of the moving axes.

収録刊行物

  • 電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society  

    電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society 126(12), 1678-1681, 2006-12-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018402769
  • NII書誌ID(NCID)
    AN10012320
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    09136339
  • NDL 記事登録ID
    8593216
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-1608
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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