Numerical Study on Photo-thermal Driven Bi-stable Micro Switch

• Takayama Yosinori

  After Graduate School, Wakayama University

• Koshimoto Yasuhiro

  Wakayama University

Bibliographic Information

Other Title

• 自己保持型光熱磁気マイクロスイッチの動作シミュレーション
• ジコ ホジガタ コウネツ ジキ マイクロスイッチ ノ ドウサ シミュレーション

Abstract

The dynamics of the micro magnetic switch driven by optical heating is simulated. By using Three Dimensional Finite Difference Time Domain (FDTD) program newly developed and FEM, a small armature composed by thermo-sensitive magnetic film can operate faster than 0.05ms by heating power of 7mW or less, Bi-stable operation is also confirmed.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 126 (12), 1245-1248, 2006

  The Institute of Electrical Engineers of Japan

Keywords

• thermo-sensitive material
• MEMS
• micro switch
• laser heating

Details

• CRID: 1390001204593485952
• NII Article ID: 10018410802
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms.126.1245
• ISSN: 13475533
• ISSN: 03854205
• NDL BIB ID: 8592806
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8592806
• Web Site: http://www.jstage.jst.go.jp/article/ieejfms/126/12/126_12_1245/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed