Interface State Analysis of Contact Plug in Semiconductor Devices

• Terada Shohei

  Hitachi Ltd.

• Asayama Kyoichiro

  Renesas Technorogy Corp.

Bibliographic Information

Other Title

• 半導体デバイスのコンタクト底部における界面状態解析

Journal

• Materia Japan

  Materia Japan 45 (12), 872-872, 2006

  The Japan Institute of Metals and Materials

Keywords

• transmission electron microscopy-electron energy loss spectroscopy (TEM-EELS)
• elemental mapping
• spatially-resolved EELS
• timeresolved acquisition technique
• semiconductor

Details

• CRID: 1390001204078545024
• NII Article ID: 10018421945
• NII Book ID: AN10433227
• DOI: 10.2320/materia.45.872
• ISSN: 18845843
• ISSN: 13402625
• Web Site: https://www.jstage.jst.go.jp/article/materia1994/45/12/45_12_872/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles