プラズマスパッタ法によるPt-C複合薄膜の作製と構造評価 Structure of Platinum and Carbon Composite Thin Films Prepared by Plasma Sputtering Method

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  Nano-particle of Pt is essential for a fabrication of high performance catalysts. It was tried to control particle size of nano-particle of Pt by preparing platinum and carbon (Pt-C) composite thin films. Pt-C composite thin films have been deposited by plasma sputtering method using methane/argon mixture gas. The sputtering voltage varied from 100 to 1000 V, the partial pressure of the methane gas varied from 0 to 1.0×10<sup>-1</sup> Pa, the total gas pressure of the methane and argon mixture was fixed at 1.8×10<sup>-1</sup> Pa. A high-purity platinum metal was used as a sputtering target. The electrical property of Pt-C composite thin films can be changed from metallic to dielectric according to the preparation conditions of the sputtering voltage and the partial pressure of the methane. These composite thin films have various structures, consist of nano-scale particles of Pt crystallites. The designed catalysts of the Pt-C composite thin films comprising nano Pt particles will be possibly obtained by optimizing the partial pressure of the methane and the sputtering voltage.<br>

収録刊行物

  • 真空  

    真空 49(12), 763-766, 2006-12-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018457665
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05598516
  • NDL 記事登録ID
    8624172
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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