超音速窒素分子ビームを用いたTi(0001)表面窒化反応のリアルタイム光電子分光観察 Real-time Photoelectron Spectroscopy for Nitridation at Ti(0001) Surface using Supersonic N_2 Molecular Beams

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  Nitridation at a Ti(0001)-1×1 surface using supersonic N<sub>2</sub> molecular beams was investigated by real-time photoelectron spectroscopy to clarify the adsorption reaction dynamics of N<sub>2</sub> molecules at the Ti surface. In a whole N<sub>2</sub> dosage region examined, N 1s spectra could be fitted well with two chemically-shifted components A and B. The binding energies were 396.9 and 396.6 eV, respectively. For both components A and B, the initial sticking probability <i>S</i><sub>0</sub>, obtained by differentiating each uptake curve of N 1s, showed a decrease feature with increasing <i>E</i><sub>t</sub> as the overall trend, while had significant minima at ∼0.3 and ∼1.5 eV. Such <i>E</i><sub>t</sub> dependences of <i>S</i><sub>0</sub> suggest that the chemisorbed states A and B are similarly caused by a trapping-mediated adsorption process through a physisorption state at lower <i>E</i><sub>t</sub> than 0.3 eV and an activated adsorption process becomes to be dominant at higher <i>E</i><sub>t</sub> than 0.3 eV. Although both components A and B can appear similarly at the initial N<sub>2</sub> adsorption stage, the component B decreases considerably after showing a maximum. The initial increase continues, however, with changing its uptake rate for the component A, indicating a change of the nitrogen adsorption state from the component B to A with progress of nitridation.<br>

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  • 真空  

    真空 49(12), 775-779, 2006-12-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018457703
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    8624195
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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