スピンコートシーディング法を用いた多結晶ダイヤモンド圧力センサ Polycrystalline Diamond Pressure Sensor using Spin Coat Seeding Method

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著者

    • 三嶋 和幸 MISHIMA Kazuyuki
    • 埼玉大学大学院理工学研究科数理電子情報専攻 Course of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University
    • 森 涼太郎 MORI Ryotaro
    • 埼玉大学大学院理工学研究科数理電子情報専攻 Course of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University
    • 高橋 幸郎 TAKAHASHI Kohro
    • 埼玉大学大学院理工学研究科数理電子情報専攻 Course of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University

抄録

Pressure sensors using polycrystalline diamond can operate at a high temperature. However, the sensors usually have a very low Gauge Factor (G.F.), less than 100 and the special process is required to improve the sensitivity. In order to obtain a high G.F. without the special fabrication process, the combination of scratch and spin coat seeding methods have been introduced. By using the proposed method, it was possible to grow the diamond film uniformly on a SiO<sub>2</sub> substrate and the adhesion force of the film to the substrate increased up to 900 N/cm<sup>2</sup> at the maximum value. Boron doped diamond films were deposited on a Si diaphragm using the developed method in a fabrication process of a pressure sensor. Although the sensor demonstrated a good linearity in the pressure response, the G.F. was only 29 because of the poor surface conduction. To improve the surface conduction, the oxygen termination of the surface and relaxation of hydrogen defect by annealing were introduced respectively. As a result, the G.F. was improved up to 168. Oxidization by hot mixed acid also improved the G.F. to 285. The sensor treated by this oxidization showed the better uniformity in the temperature characteristic.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(2), 96-101, 2007-02-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018480080
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8668919
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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