マイクロ光造形法で作製した構造物の機械的特性評価 Mechanical Property Evaluation of Micro Cantilever Fabricated Using Micro-Stereolithography
Dependence of elastic modulus of micro cantilever fabricated by micro-stereolithography (μSL) on irradiation laser power is investigated in this study. The samples are formed by changing the irradiation laser power of μSL system and postcure processing time. A device for measuring deflection of the micro cantilever and applied load is developed. Then, the elastic moduli of the samples are evaluated from the gradient of the measured load-deflection relation and the formula of the strength of materials. Results show that the elastic modulus of the micro cantilever made by μSL is depend on the irradiation laser power. That is, the mechanical property of micro structures can be controlled by the irradiation laser power and post cure process.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(2), 102-108, 2007-02-01
The Institute of Electrical Engineers of Japan