シンクロトロン光励起プロセスの半導体応用と展望 [in Japanese] Application and Perspective of Synchrotron Light-excited Process in Semiconductor Development [in Japanese]
Access this Article
Search this Article
Synchrotron light-excited process is one of the promising techniques for future semiconductor processes. In this report, we introduce several examples of the application of the synchrotron light-excited process on the semiconductor development, and focus especially on the growth and etching of II-VI compound semiconductor. In addition, the outline of a beamline for the development of advanced materials and processing at Saga Light Source is reported as a future perspective of the synchrotron light-excited process.
- IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Electronics, Information and Systems 127(2), 126-132, 2007-02-01
The Institute of Electrical Engineers of Japan