超音速酸素分子ビームによる並進運動エネルギー誘起Ti(0001)表面酸化反応 [in Japanese] Translational Kinetic Energy Induced Oxidation on Ti(0001) Surfaces Using a Supersonic O_2 Beam [in Japanese]
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The initial sticking probability <i>S</i><sub>0</sub> of O<sub>2</sub> molecules on a Ti(0001)1×1 surface at room temperature was measured as a function of translational kinetic energy <i>E</i><sub>t</sub> by real-time photoelectron spectroscopy. The O 1s photoelectron spectra can be fitted well with three components A, B and C, where the chemical shift of component B and C are +0.7 and +1.6 eV relative to the binding energy of component A (528.8 eV). Upon exposing to the O<sub>2</sub> beam, component A and C appear dominantly and component B grows with an incubation time, indicating that two kinds of chemical adsorption states are concerned with dissociative adsorption of O<sub>2</sub> molecules at the initial stage. The <i>E</i><sub>t</sub> dependences of <i>S</i><sub>0</sub> show quite different behaviors between component A and C: <i>S</i><sub>0</sub> of component C decreases monotonously with <i>E</i><sub>t</sub> and is almost constant above 0.6 eV, while <i>S</i><sub>0</sub> of component A shows a rapid decrease followed by a gradual increase with a minimum at ∼0.5 eV and then decreases two small maxima at ∼0.9 and ∼1.8 eV. The observed <i>E</i><sub>t</sub> dependences of <i>S</i><sub>0</sub> for component A and C are discussed in terms of a trapping-mediated adsorption and an activated adsorption process and the chemical adsorption state corresponding to component A and C is also considered.
- IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Electronics, Information and Systems 127(2), 140-145, 2007-02-01
The Institute of Electrical Engineers of Japan