CO_2レーザ生成プラズマの極端紫外発光特性 Characteristics of Extreme Ultraviolet Emission from CO_2 Laser-Produced Plasma
In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO<sub>2</sub> laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO<sub>2</sub> laser. The conversion efficiency to 13.5 nm was ∼0.2 %. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO<sub>2</sub> LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO<sub>2</sub> LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO<sub>2</sub> LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2 % in maximum.
- 電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society
電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 127(2), 155-159, 2007-02-01
The Institute of Electrical Engineers of Japan