CO_2レーザ生成プラズマの極端紫外発光特性 Characteristics of Extreme Ultraviolet Emission from CO_2 Laser-Produced Plasma

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In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO<sub>2</sub> laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO<sub>2</sub> laser. The conversion efficiency to 13.5 nm was ∼0.2 %. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO<sub>2</sub> LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO<sub>2</sub> LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO<sub>2</sub> LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2 % in maximum.

収録刊行物

  • 電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society  

    電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 127(2), 155-159, 2007-02-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018480421
  • NII書誌ID(NCID)
    AN10065950
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03854221
  • NDL 記事登録ID
    8668167
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-795
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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