Deposition of thin film using plasma focus device

• NAKADA Youhei

  University Of Toyama

• MIZUNO Toshiya

  University Of Toyama

• REZA Yousefi Hamid

  University Of Toyama

• KITAMURA Iwao

  University Of Toyama

• ITOU Hiroaki

  University Of Toyama

• MASUGATA Katumi

  University Of Toyama

Bibliographic Information

Other Title

• プラズマフォーカスを用いた材料開発研究

Journal

• 電気学会研究会資料. PST, プラズマ研究会

  電気学会研究会資料. PST, プラズマ研究会 2007 (1), 103-106, 2007-01-26

Keywords

• Plasma Focus
• thin carbon film
• proton beam

Details

• CRID: 1570572700436091648
• NII Article ID: 10018499923
• NII Book ID: AA11501025
• Text Lang: ja
• Data Source:
  • CiNii Articles