Vacuum Characteristics of Titanium Materials and Applications to UHV Systems

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  • KURISU Hiroki
    Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University
  • YAMAMOTO Setsuo
    Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University
  • MATSUURA Mitsuru
    Department of Advaced Science and Engineering, Faculty of Engineering, Yamaguchi University
  • MORIMOTO Takashi
    Shinko Industries, Company Limited
  • HESAKA Masaki
    Shinko Industries, Company Limited

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Other Title
  • チタン材料の真空特性と応用展開
  • チタン ザイリョウ ノ シンクウ トクセイ ト オウヨウ テンカイ

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Abstract

  This paper reviewed the vacuum characteristic of titanium materials and applications to an UHV system of the current research and development. It has been found that the outgassing rate of the titanium material is very low compared with an existing material such as a stainless steel or an aluminum alloy, and the UHV system made of the titanium material has very high vacuum performance, e.g., very quick pumping and the achievement of UHV/XHV pressure under the simple pre-baking condition.<br>

Journal

  • Shinku

    Shinku 50 (1), 41-46, 2007

    The Vacuum Society of Japan

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