チタン系真空材料の表面キャラクタリゼーション Characterization of the Surface Oxide Layer Formed on a Titanium Alloy Material for Ultrahigh Vacuum

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  The surface oxide layer of a titanium alloy treated by mechanochemical polishing (MCP) was characterized using a scanning electron microscope (SEM), transmission electron microscope (TEM), atomic force microscope (AFM), X-ray photoelectoron spectoroscopy (XPS), auger electoron spectoroscopy (AES) and secondary ion mass spectrometry (SIMS). The results showed that surface oxide layer was amorphous titanium oxide and had about 5 nm thickness. At the interface between surface oxide layer and substrate, there was a region of high hydrogen concentration. In the same region, the Ti-F chemical component was found. It seems that this interface layer acts as a barrier for the bulk hydrogen diffusion, and gives low hydrogen concentration at the surface layer resulting in the low outgassing property in the titanium materials.<br>

収録刊行物

  • 真空

    真空 50(1), 53-56, 2007-01-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018546743
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    8675536
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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