第28回真空展 VACUUM2006 の報告

• SASAKI Masami

  キヤノンアネルバテクニクス(株)

• SHIGYOU Nobumitsu

  神港精機(株)

Journal

• Shinku

  Shinku 50 (1), 60-61, 2007

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679044248192
• NII Article ID: 10018546759
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.50.60
• ISSN: 18809413
• ISSN: 05598516
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles