大気圧非平衡プラズマのミクロ構造を利用した垂直配向単層カーボンナノチューブの合成

• 大西 空摩

  東京工業大学 大学院理工学研究科

• 野崎 智洋

  東京工業大学 大学院理工学研究科

• 岡崎 健

  東京工業大学 大学院理工学研究科

• Heberlein Joachim

  The University of Minnesota, Dept. of Mechanical Engineering

• Kortshagen Uwe

  The University of Minnesota, Dept. of Mechanical Engineering

書誌事項

タイトル別名

• Synthesis of Vertically-Aligned Single-Walled Carbon Nanotubes in Micro Structure of Atmospheric Pressure Non-Equilibrium Plasma
• タイキアツ ヒヘイコウ プラズマ ノ ミクロ コウゾウ オ リヨウ シタ スイチョク ハイコウ タンソウ カーボン ナノチューブ ノ ゴウセイ

抄録

Plasma enhanced chemical vapor deposition (PECVD) is recognized as one of the viable fabrication techniques of carbon nanotubes. The outstanding advantage of PECVD is that free-standing, vertically-aligned carbon nanotubes (VA-CNTs) are synthesized due to the electric field normal to the substrate. This feature draws intense attention for the fabrication of nanoelectronic devices such as high-resolution scanning nanoprobes, interconnects, and field emission devices. However, carbon nanotubes synthesized in PECVD are overwhelmingly carbon nanofibers (CNFs) or multi-walled carbon nanotubes (MWNTs) with measurable structural defects. Tremendous interest in the preparation and characterization of vertically-aligned single-walled carbon nanotubes (VA-SWNTs) and related applications had not been realized in the scope of PECVD until recently. Here we present a fabrication technique of high-purity vertically-aligned single-walled carbon nanotubes using atmospheric pressure plasma enhanced chemical vapor deposition. By now, we have developed the atmospheric pressure radio-frequency discharge (APRFD) for this purpose. Although densely mono-dispersed Fe-Co catalysts of a few nanometers is primarily responsible for VA-SWNT growth, carbon precipitation was virtually absent in the thermal CVD regime at 700°C. On the other hand, high-yield VA-SWNTs were grown at 4 μm min^-1 by applying the atmospheric pressure radio-frequency discharge. The results proved that cathodic ion sheath adjacent to the substrates, where a large potential drop exists, also plays an essential role for the controlled growth of SWNTs, while ion damage to the VA-SWNTs is inherently avoided due to high collision frequency among molecules in atmospheric pressure. In this paper, operation regime of APRFD and tentative reaction mechanisms for VA-SWNT growth are discussed along with optical imaging of near substrate region of APRFD.

収録刊行物

• 日本伝熱学会論文集

  日本伝熱学会論文集 15 (1), 9-14, 2007

  社団法人 日本伝熱学会

キーワード

• Atmospheric pressure plasma
• Single-walled carbon nanotubes
• Collisional sheath

詳細情報

• CRID: 1390282679390749568
• NII論文ID: 10018576161
• NII書誌ID: AA11358679
• DOI: 10.11368/tse.15.9
• ISSN: 18822592
• ISSN: 09189963
• NDL書誌ID: 8658359
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8658359
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可