Molecular-Scale Transport Phenomena in Thin-Film Deposition

• QIU Taiqing

  Department of Mechanical Engineering, The University of Tokyo

• AOKI Isao

  Department of Mechanical Engineering, The University of Tokyo

• KOTAKE Susumu

  Department of Mechanical Engineering, The University of Tokyo

Journal

• Thermal science and engineering

  Thermal science and engineering 3 (3), 95-100, 1995-05-01

Keywords

• Thin film deposition
• Molecular scale phenomena
• Laser excitation

Details

• CRID: 1571980075311429376
• NII Article ID: 10018603294
• NII Book ID: AA11358679
• ISSN: 09189963
• Text Lang: en
• Data Source:
  • CiNii Articles