Laser Spectroscopic Diagnostics of Laser-Ablation Processes Used for Thin Film Deposition

• OKADA Tatsuo

  Department of Electrical and Electronic Systems, Kyushu University

• NAKATA Yoshiki

  Department of Electronic Device, Kyushu University

• SOUMAGNE Georg

• KAIBARA Hiroshi

  Department of Electrical and Electronic Systems, Kyushu University

• MAEDA Mitsuo

収録刊行物

• 伝熱研究 = News of HTSJ

  伝熱研究 = News of HTSJ 35 (138), 27-33, 1996-07-01

キーワード

• Laser ablation
• Pulsed-laser deposition
• Laser spectroscopy

詳細情報

• CRID: 1571698600334589312
• NII論文ID: 10018605378
• NII書誌ID: AN0015409X
• ISSN: 09107851
• 本文言語コード: en
• データソース種別:
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