Catalyst Combustors with B-Doped SiGe/Au Thermopile for Micro-Power-Generation

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著者

    • Houlet Lionel F.
    • National Institute of Advanced Industrial Science and Technology (AIST), Nagoya 463-8560, Japan
    • Izu Noriya
    • National Institute of Advanced Industrial Science and Technology (AIST), Nagoya 463-8560, Japan
    • Matsubara Ichiro
    • National Institute of Advanced Industrial Science and Technology (AIST), Nagoya 463-8560, Japan
    • Murayama Norimitsu
    • National Institute of Advanced Industrial Science and Technology (AIST), Nagoya 463-8560, Japan

抄録

A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thick-film catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.

収録刊行物

  • Japanese journal of applied physics. Pt. 2, Letters  

    Japanese journal of applied physics. Pt. 2, Letters 45(42), L1130-L1132, 2006-11-25 

    Japan Society of Applied Physics

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被引用文献:  1件

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各種コード

  • NII論文ID(NAID)
    10018632214
  • NII書誌ID(NCID)
    AA10650595
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    0021-4922
  • NDL 記事登録ID
    8548158
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z54-J337
  • データ提供元
    CJP書誌  CJP引用  NDL  JSAP 
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