Catalyst Combustors with B-Doped SiGe/Au Thermopile for Micro-Power-Generation
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A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thick-film catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.
- Jpn J Appl Phys
Jpn J Appl Phys 45(42), L1130-L1132, 2006-11-25
INSTITUTE OF PURE AND APPLIED PHYSICS