Ion Beam Bending of Nano Scale Materials in Free Space
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We report an ion beam bending process to control the shape of nanometer scale materials. 5–30 keV gallium ion beam was found to plastically bend diverse materials having nanometer scale geometries of free-standing tube, spike and plank, along the ion beam so that their free end is directed toward the ion source, in vacuum space free of any applied electric or magnetic field. With the process, we could create a bent tip for scanning force microscope and hooks for nano-manipulation, out of straight spikes carved with nano-scale dimensions.
- Jpn J Appl Phys
Jpn J Appl Phys 45(43), L1162-L1164, 2006-11-25
INSTITUTE OF PURE AND APPLIED PHYSICS