Thermodynamic Analysis of Various Types of Hydride Vapor Phase Epitaxy System for Hi h-Speed Growth of InN

• Jun Kikuchi

• Yuuki Nishizawa

• Hisashi Murakami

書誌事項

タイトル別名

• Thermodynamic Analysis of Various Types of Hydride Vapor Phase Epitaxy System for Hi h Speed Growth of InN

収録刊行物

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 45 (42-45), L1203-1205, 2006-11

  Tokyo : Japan Society of Applied Physics

キーワード

• InCl3
• Cl2
• source zone

詳細情報

• CRID: 1522262179820459392
• NII論文ID: 10018632545
• NII書誌ID: AA11906093
• ISSN: 00214922
• NDL書誌ID: 8548608
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8548608
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles