Novel Planar Electrode Structure for High-Speed(>40GHz) Electroabsorption Modulators

• Jian Wang

• Bing Xiong

• Peng-Fei Cai

Bibliographic Information

Other Title

• Novel Planar Electrode Structure for High Speed 40GHz Electroabsorption Modulators

Journal

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 45 (42-45), L1209-1211, 2006-11

  Tokyo : Japan Society of Applied Physics

Keywords

• inductively coupled plasma
• dry etching

Details

• CRID: 1520854805702901248
• NII Article ID: 10018632590
• NII Book ID: AA11906093
• ISSN: 00214922
• NDL BIB ID: 8548643
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8548643
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • CiNii Articles