Surface characterization of SiO_2 films converted from perhydropolysilazane by curing treatment

• HAZE Masakiyo

  Graduate School of Science and Technology, Keio University

• KAMIDE Atsushi

  Department of Mechanical Engineering, Keio University

• KOMOTORI Jun

  Department of Mechanical Engineering, Keio University

• SHINDO Toyohiko

  Contamination Control Services INC

Journal

• 電気学会研究会資料. MBE, 医用・生体工学研究会

  電気学会研究会資料. MBE, 医用・生体工学研究会 2006 (75), 39-42, 2006-11-08

Details

• CRID: 1572824500206224768
• NII Article ID: 10018648165
• NII Book ID: AN10074011
• Text Lang: en
• Data Source:
  • CiNii Articles