フッ素系樹脂を用いた超音波マイクロアレイセンサの特性改善 Improvement of Ultrasonic Micro Array Sensor Using the Amorphous Fluorocarbon Polymer Film
Arrayed ultrasonic transducers using the piezoelectric thin film (lead-zirconate-titanate film: Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> : PZT) having multilayer diaphragm structures are fabricated. The variation in resonant frequencies of conventional ultrasonic sensors is 7.3% in standard deviation, although those have the same structure. In order to reduce the variation of resonant frequency, membrane is coated by amorphous fluorocarbon polymer (FC) film (CYTOP, AGC). The variation in resonant frequencies of new ultrasonic sensors is 2.3% in standard deviation. The resonant frequency and Q-value and sensitivity of new ultrasonic sensors are estimated to be on the order of 56.9kHz and 28.3 and 114 μV/Pa, respectively. This amorphous fluorocarbon polymer film is effective for improvement of reception characteristic of ultrasonic sensor. This ultrasonic micro array sensor using the amorphous fluorocarbon polymer film is shown to be useful for three-dimensional object detection system.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(1), 7-13, 2007-01-01
The Institute of Electrical Engineers of Japan