フッ素系樹脂を用いた超音波マイクロアレイセンサの特性改善 Improvement of Ultrasonic Micro Array Sensor Using the Amorphous Fluorocarbon Polymer Film

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Arrayed ultrasonic transducers using the piezoelectric thin film (lead-zirconate-titanate film: Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> : PZT) having multilayer diaphragm structures are fabricated. The variation in resonant frequencies of conventional ultrasonic sensors is 7.3% in standard deviation, although those have the same structure. In order to reduce the variation of resonant frequency, membrane is coated by amorphous fluorocarbon polymer (FC) film (CYTOP, AGC). The variation in resonant frequencies of new ultrasonic sensors is 2.3% in standard deviation. The resonant frequency and Q-value and sensitivity of new ultrasonic sensors are estimated to be on the order of 56.9kHz and 28.3 and 114 μV/Pa, respectively. This amorphous fluorocarbon polymer film is effective for improvement of reception characteristic of ultrasonic sensor. This ultrasonic micro array sensor using the amorphous fluorocarbon polymer film is shown to be useful for three-dimensional object detection system.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(1), 7-13, 2007-01-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018660300
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8625963
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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