A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners

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This paper describes a sensing technique to detect beam deflections caused by the two different vibration modes, i.e. bending and torsion modes of a micro cantilever, separately with two piezoresistor bridge circuits. Fabrication process to incorporate this detection circuitry into a two-dimensional optical microscanner together with the signal processing circuitry for self-sustaining vibrations are presented, which enables a compact feedback control of the two-dimensional optical scanning. Prototype optical scanners with this detection circuitry and magnetostirictive actuation have been fabricated with MEMS technology and tested to verify this technology.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(1), 31-36, 2007-01-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018660357
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8626115
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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