A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners
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This paper describes a sensing technique to detect beam deflections caused by the two different vibration modes, i.e. bending and torsion modes of a micro cantilever, separately with two piezoresistor bridge circuits. Fabrication process to incorporate this detection circuitry into a two-dimensional optical microscanner together with the signal processing circuitry for self-sustaining vibrations are presented, which enables a compact feedback control of the two-dimensional optical scanning. Prototype optical scanners with this detection circuitry and magnetostirictive actuation have been fabricated with MEMS technology and tested to verify this technology.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 127(1), 31-36, 2007-01-01
The Institute of Electrical Engineers of Japan