A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners
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- Muro Hideo
- Chiba Institute of Technology
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- Oki Takahiko
- Nissan Motor Co., Ltd.
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- Asaoka Akira
- Nissan Motor Co., Ltd.
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- Bourouina Tarik
- ESIEE, Cité Descartes 2 Bd Blaise Pascal
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- Reyne Gilbert
- CNRS, LEG, ENSIEG, INPG, BP46
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- Debray Alexis
- Canon Inc.
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- Lebrasseur Eric
- University of Tokyo
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- Fujita Hiroyuki
- University of Tokyo
Bibliographic Information
- Other Title
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- Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners
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Abstract
This paper describes a sensing technique to detect beam deflections caused by the two different vibration modes, i.e. bending and torsion modes of a micro cantilever, separately with two piezoresistor bridge circuits. Fabrication process to incorporate this detection circuitry into a two-dimensional optical microscanner together with the signal processing circuitry for self-sustaining vibrations are presented, which enables a compact feedback control of the two-dimensional optical scanning. Prototype optical scanners with this detection circuitry and magnetostirictive actuation have been fabricated with MEMS technology and tested to verify this technology.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 127 (1), 31-36, 2007
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679437773312
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- NII Article ID
- 10018660357
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- NII Book ID
- AN1052634X
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- BIBCODE
- 2007IJTSM.127...31M
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 8626115
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed