High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks

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Surface polishing is required for small crystal blanks to eliminate frequency spurious generated by the infinite rectangular shape. From the productivity viewpoint, bi-convex or plano-cylindrical surface are generally used to realize the energy trapping at the central part of the blanks. So far barrel polishing is the common fabrication technology to obtain bi-convex surface, however, the surface is finished insufficiently and fabrication process takes longer time as the blank size becomes small. To solve this difficulty, two types of new surface micro-polishing mechanisms with fixed abrasive and arrayed blank arrangement are experimentally examined to obtain plano-cylindrical surface. The fastest finishing time of 10 s for a blank is achieved together with the spurious elimination.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(1), 37-41, 2007-01-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018660374
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8626148
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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