High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks

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  • Hatsuzawa Takeshi
    Precision and Intelligence Laboratory, Tokyo Institute of Technology
  • Hamano Hisashi
    Precision and Intelligence Laboratory, Tokyo Institute of Technology
  • Saito Masashi
    Precision and Intelligence Laboratory, Tokyo Institute of Technology
  • Yanagida Yasuko
    Precision and Intelligence Laboratory, Tokyo Institute of Technology

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Surface polishing is required for small crystal blanks to eliminate frequency spurious generated by the infinite rectangular shape. From the productivity viewpoint, bi-convex or plano-cylindrical surface are generally used to realize the energy trapping at the central part of the blanks. So far barrel polishing is the common fabrication technology to obtain bi-convex surface, however, the surface is finished insufficiently and fabrication process takes longer time as the blank size becomes small. To solve this difficulty, two types of new surface micro-polishing mechanisms with fixed abrasive and arrayed blank arrangement are experimentally examined to obtain plano-cylindrical surface. The fastest finishing time of 10 s for a blank is achieved together with the spurious elimination.

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